Program Results

Introduction to the event

We have developed the research capabilities requiring for silicon photonics and metamaterials, including nanofabrication, full-wave electromagnetic simulation, and testing equipment. (1) Nanofabrication: we have fabricated various silicon photonic components on silicon-on-insulator substrate using electron beam lithography and plasma etching. (2) Full-wave electromagnetic simulation: we use finite-difference time-domain and rigorous coupled-mode analysis to design metalens monolithically integrated on silicon photonics. (3) Testing equipment: we construct equipment for testing silicon photonic chips based on grating coupling, edge coupling and infrared microscope.